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ͷ߾װ罺̻һ




豸ߴ 150013001750mmߣ
ʽ ٸ߾+ѧ
Indexʽ XY Tableʽ
罺ϵͳ 0.01mm
2.5%
UV̻ 450mj.cm2
òƷ ֹVCM+LENS
600~800UPHƷͬ
X-accuracy 10um
Y-accuracy 10um
Z-accuracy 10um
ξ߾ 10um
ξ߿滻 99.5%
Particle control ̬Class 100
һ FPCԶ̻ܰ һװ
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